Application introduction
Automated material storage and management at semiconductor production
Applies to :
1.High density storage, high space utilization, full use of height space
2.Fast beat
3.Integrated into the shop floor material management system
4.Fast implementation, automatic level teaching test
5.Compatible with ARV/OHT/OHS/manual and other automatic processes
6.Complies with Cleanroom ISO14644-14, SEMI S2 Standard and ESD standards
Function introduction
*It is used for semiconductor on-line storage, support FOUP, CASSETTE, Magazine, Tray and others
*Can dock with ARV, support manual loading and unloading
*Complies with Cleanroom ISO14644-14, SEMI S2 Standard and ESD standards
*Standard SEMI software interface
*Modular design
Block4. No.358 Jinhu Road, Pudong District, Shanghai, China