High-density storage, High space utilization, Full utilization of height space
Automated material level instructional testing
Rapid implementation
High space utilization
Semiconductor Fab engineering
Application introduction
Automated material storage and management at semiconductor production
Applies to ：
1.High density storage, high space utilization, full use of height space
2.Fast beat
3.Integrated into the shop floor material management system
4.Fast implementation, automatic level teaching test
5.Compatible with ARV/OHT/OHS/manual and other automatic processes
6.Complies with Cleanroom ISO14644-14, SEMI S2 Standard and ESD standards
Function introduction
*It is used for semiconductor on-line storage, support FOUP, CASSETTE, Magazine, Tray and others
*Can dock with ARV, support manual loading and unloading
*Complies with Cleanroom ISO14644-14, SEMI S2 Standard and ESD standards
*Standard SEMI software interface
*Modular design
Block4. No.358 Jinhu Road, Pudong District, Shanghai, China
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