Full-area safety and security, integrated demonstrator, charging versatility
Body Dimensions
Combined Accuracy
Navigation Methods
Platform Loads
Application introduction
*Automated material handling at semiconductor wire edges
*Suitable for processes with loose production cycles
*Suitable for individual material flow situations
*It is suitable for the flow of people on the ground and material handling without restrictions
*Suitable for shop floor equipment is not fixed and support layout change
*Applies to Wafer test BG WS DB WB Final TEST
*Compliance with Cleanroom ISO14644-14 、 SEMI S2 Standard and ESD standards
Charging System
Single battery station
| Storage Quantity | 1/2bin+ 1 change bin |
| Clean Class | class 1K |
| Control System | PLC |
| Data System | BCMS ( optional) |
| Battery replacement time | 3 minutes |
Battery station
| Storage Quantity | ≥5 bins |
| Clean Class | class 1K |
| Control System | PLC |
| Data System | BCMS |
| Battery replacement time | 4 minutes |
Battery managment system
Application introduction
*Automated material handling at semiconductor production
*It is suitable for short cycle times and multiple combined production situations
*It is suitable for point-to-point handling with large volume, heavy weight, and low docking accuracy
*Suitable for OVEN , Burn in, Rack baskets, box carrier
*Complies with Cleanroom ISO14644-14, SEMI S2 Standard and ESD standards
Applications
Wafer polishing and transport
SMT MGZ loading and unloading
OVEN loading and unloading
E-rack transshipment
Block4. No.358 Jinhu Road, Pudong District, Shanghai, China
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